Funding
EMP is funded through the Horizon2020 programme of the European Commission. 
Selected Publications
- Photon Transport in a Bose-Hubbard Chain of Superconducting Artificial Atoms
G. P. Fedorov et al., Phys. Rev. Lett. 126, 180503 (2021) - Path-Dependent Supercooling of the
He3 Superfluid A-B Transition
Dmytro Lotnyk et al., Phys. Rev. Lett. 126, 215301 (2021) - Superconductivity in an extreme strange metal
D. H. Nguyen et al., Nat Commun 12, 4341 (2021) - High-Q Silicon Nitride Drum Resonators Strongly Coupled to Gates
Xin Zhou et al., Nano Lett. 21, 5738-5744 (2021) - Measurement of the 229Th isomer energy with a magnetic micro-calorimeter
T. Sikorsky et al., Phys. Rev. Lett. 125 (2020) 142503
Silicon nanobridge as a high quality mechanical resonator
D. E. Presnov, A. A. Dorofeev, I. V. Bozhev, A. Trifonov, S. G. Kafanov, Y. A. Pashkin, V. A. KrupeninThe paper presents details of the fabricating technology of nanoscale mechanical resonators based on suspended silicon nanowires. The structures were made from silicon on insulator material, the thickness of the upper layer of silicon is 110 nm, the thickness of silicon oxide is 200 nm. Fabrication process contains standard CMOS compatible technologies only: electron lithography with positive resist, reactive ion and liquid etching, electron beam deposition of thin films. The presented structures can be used as sensors of mass, displacement, acceleration, pressure with extremely high sensitivity.
International Conference on Micro- and Nano-Electronics 2018 (2019)
doi: 10.1117/12.2521034